Location History:
- Ilan Hsien, TW (2003)
- I-Lan, TW (2003 - 2005)
Company Filing History:
Years Active: 2003-2005
Title: **Inventor Spotlight: Chi-Yuan Hung from Ilan, Taiwan**
Introduction
Chi-Yuan Hung is an accomplished inventor based in Ilan, Taiwan, known for his significant contributions to the field of photolithography and mask fabrication technology. With three patents to his name, he has carved out a niche in optimizing the manufacturing processes for photomasks, which are critical components in semiconductor manufacturing.
Latest Patents
Chi-Yuan Hung's latest patents showcase innovative methods that advance the efficiency and accuracy of phase shift masks (PSMs). One notable patent details a method for fabricating a PSM by forming a patterned photoresist layer on an opaque layer over a transparent plate. This method enables the formation of a phase shift opening, effectively aligning the phase shift layer and reducing costs associated with mask manufacture. Another significant patent introduces a three-dimensional mask that enhances the coherence of radiation through edge patterns by adjusting the thickness of the opaque layer. This innovation effectively mitigates the optical proximity effect (OPE), preventing distortion and depth of focus deficiencies during fine pattern exposure.
Career Highlights
Chi-Yuan Hung currently works at Macronix International Co., Ltd., where he applies his expertise in semiconductor technology. His patents not only reflect his innovative spirit but also contribute to the ongoing advancements in the semiconductor industry, which is vital for modern electronics.
Collaborations
Throughout his career, Chi-Yuan has collaborated with talented professionals such as I-Pien Wu and Henry Wei-Ming Chung. These collaborations have strengthened his innovative work and expanded the impact of his patents in the technology sector.
Conclusion
Chi-Yuan Hung is a prominent figure in the field of innovations related to photolithography and mask technologies. His groundbreaking patents and collaborations highlight his commitment to improving manufacturing processes in semiconductor technology. As the industry continues to evolve, the contributions of inventors like Chi-Yuan Hung play a crucial role in supporting advancements that drive technology forward.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.