Company Filing History:
Years Active: 2000-2002
Title: Cheng-Sung Huang: Innovator in Semiconductor Technology
Introduction
Cheng-Sung Huang is a notable inventor based in Feng-Yuan, Taiwan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approaches to improving manufacturing processes.
Latest Patents
One of his latest patents is titled "Nitride deposition on tungsten-polycide gate to prevent abnormal tungsten silicide oxidation." This patent describes a method of forming a non-oxidized WSi layer on a semiconductor wafer. The process involves providing a semiconductor wafer with a silicon substrate within a CVD tool, forming a WSi layer over the silicon substrate, and subsequently forming an SiN layer upon the WSix layer in the absence of oxygen, ensuring that the WSi layer remains non-oxidized.
Another significant patent is focused on a "Method of detecting end point and monitoring uniformity in chemical-mechanical polishing." This invention outlines a method for monitoring the state of chemical-mechanical polishing applicable to the polishing of a metallic layer over a substrate. The method includes performing a series of scanning operations while a wafer is being polished to generate multiple reflectance line spectra during each polishing period. The degree of dispersion of the reflectance spectra is utilized as a polishing index, with the standard deviation of the reflectance spectra serving as a monitoring index to determine the polishing end point.
Career Highlights
Cheng-Sung Huang has worked with prominent companies in the semiconductor industry, including United Microelectronics Corporation and Promos Technologies, Inc. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor manufacturing.
Collaborations
Throughout his career, Cheng-Sung has collaborated with talented individuals such as Ming-Cheng Yang and Feng-Yeu Shau. These collaborations have contributed to the advancement of technology in their respective fields.
Conclusion
Cheng-Sung Huang is a distinguished inventor whose work in semiconductor technology has led to valuable patents and innovations. His contributions continue to influence the industry and pave the way for future advancements.