Cheng-Shun Chen

Title: Cheng-Shun Chen: Innovator in Semiconductor Technology

Introduction

Cheng-Shun Chen is a notable inventor based in Miaoli, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on innovative processes that enhance the fabrication of capacitors and seamless gap filling in semiconductor structures.

Latest Patents

Cheng-Shun Chen's latest patents include a "Capacitor structure and process for fabricating the same." This patent describes a process for fabricating a capacitor by forming a template layer over a substrate, which includes a stack of at least one first layer and at least one second layer with different etching selectivities. An opening is created through the template layer, followed by a wet etching process to recess the first layer relative to the second layer. A bottom electrode of the capacitor is then formed at the bottom and sidewall of the opening, after which the template layer is removed.

Another significant patent is related to "Methods of seamless gap filling." This method involves providing a semiconductor structure with a device layer that has a gap with an aspect ratio greater than 4. A liner layer is formed over the device layer exposed by the gap, followed by the formation of a first un-doped oxide layer, a doped oxide layer, and a second un-doped oxide layer to fill the gap. An annealing process is then performed to create a seamless oxide layer within the gap, which features an interior doped region.

Career Highlights

Cheng-Shun Chen is currently employed at Nan Ya Technology Corporation, where he continues to innovate in semiconductor technology. His work has been instrumental in advancing the capabilities of capacitor fabrication and gap filling methods, which are critical in the production of high-performance semiconductor devices.

Collaborations

Cheng-Shun Chen collaborates with talented coworkers, including Shuo-Che Chang and Hui-Lan Chang. Their combined expertise contributes to the innovative environment at Nan Ya Technology Corporation.

Conclusion

Cheng-Shun Chen is a prominent figure in the semiconductor industry, recognized for his innovative patents and contributions to technology. His work continues to influence the development of advanced semiconductor manufacturing processes.