Company Filing History:
Years Active: 2001-2002
Title: Innovations by Cheng-Chen Kuo: Pioneering Advances in Semiconductor Technology
Introduction: Cheng-Chen Kuo, an inventive mind located in Kaohsiung, Taiwan, has made significant contributions to the semiconductor industry. With two patents under his name, he is recognized for developing innovative solutions that enhance the manufacturing process of semiconductor devices.
Latest Patents: Cheng-Chen Kuo’s latest patents demonstrate his expertise in tackling alignment issues in semiconductor fabrication. The first patent involves an arc coating on mask quartz plates to avoid alignment errors on steppers or scanners. This innovation eliminates light diffusion within light measurement tools by depositing an Anti-Reflective Coating on the quartz mask's second surface. This prevents internally reflected light from exiting the mask, thereby eliminating the source of light diffusion.
His second patent introduces a novel overlay matching method that addresses alignment-induced errors while optimizing lens matching. This method utilizes a reference stepper and a reference mask that features a pattern of alignment marks. The calibration process involves measuring alignment errors between the reference marks and those created on the substrate surface, which then informs software modeling programs to adjust the matching stepper for enhanced precision in alignment.
Career Highlights: Cheng-Chen Kuo has dedicated his career to Taiwan Semiconductor Manufacturing Company Limited, contributing significantly to the development of groundbreaking semiconductor technologies. His work has had a lasting impact on the efficiency and accuracy of semiconductor manufacturing processes.
Collaborations: Throughout his career, Cheng-Chen Kuo has collaborated with esteemed colleagues such as Han-Ming Sheng and Chu-Wen Huang. Their collective efforts have fostered innovation and advancement in their field, showcasing the power of teamwork in driving technological progress.
Conclusion: Cheng-Chen Kuo’s contributions to semiconductor technology highlight the importance of innovation in driving the industry forward. His patents reflect a deep understanding of the challenges faced in semiconductor manufacturing and offer effective solutions that enhance precision and efficiency. As technology continues to evolve, the work of inventors like Cheng-Chen Kuo remains crucial to shaping the future of the semiconductor landscape.