This inventor holds 2 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2000-2002.
Company Filing History:
Years Active: 2000-2002
Title: Innovations of Chen-Hwa Yu
Introduction
Chen-Hwa Yu is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approaches to improving manufacturing processes.
Latest Patents
One of his latest patents is the "Headless CMP process for oxide planarization." This method focuses on planarizing an oxide surface and effectively removing dishing or erosion defects from semiconductor wafers. The process involves rotating a wafer at a speed of at least 1000 RPM while injecting a solvent and abrasive particles mixture onto the surface. This technique ensures the removal of metal residues and defects, with the rotational speed adjustable between 1000 RPM and 10,000 RPM. For oxide layer removal, diluted HF and aluminum oxide are utilized as suitable solvents and abrasive particles.
Another significant patent is the "Gate micro-patterning process." This innovative method allows for the formation of sub-micron features, particularly gate features, with dimensions less than 0.25 micrometers to 0.18 micrometers. The process employs very thin lithographic layers to control the critical dimension width of polysilicon gates precisely. It involves forming a conductive layer over a gate oxide layer, followed by a planarization layer and an anti-reflective coating. A high-resolution photoresist mask is created without reflections, enabling the precise transfer of patterns through etching.
Career Highlights
Chen-Hwa Yu is currently employed at Taiwan Semiconductor Manufacturing Company Ltd. His work has significantly impacted the semiconductor industry, particularly in enhancing the efficiency and precision of manufacturing processes.
Collaborations
He has collaborated with notable coworkers, including Fan-Keng Yang and Tze-Liang Lee, contributing to advancements in semiconductor technology.
Conclusion
Chen-Hwa Yu's innovative patents and contributions to semiconductor manufacturing processes highlight his role as a leading inventor in the field. His work continues to influence the industry, paving the way for future advancements.