Chen-Chung Li

Title: Innovations of Chen-Chung Li in Ion Implantation Technology

Introduction

Chen-Chung Li is a notable inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative work on ion implantation technology. His expertise and inventions have played a crucial role in advancing the efficiency and effectiveness of ion implanters used in the industry.

Latest Patents

Chen-Chung Li holds a patent for an "Ion implanter and method of preventing undesirable ions from implanting a target wafer." This invention includes an ion source, an AMU analyzing magnet with a fixed radius, an ion extraction voltage source, a communication interface for monitoring implantation parameters, and an equipment server with a data log. The ion implanter is equipped with an arithmetic processor that determines a real-time estimated radius of the circular path of ions being implanted into a target wafer. The method also involves real-time monitoring to ensure that the desired ions are being implanted correctly, adjusting the implanter if necessary.

Career Highlights

Chen-Chung Li is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work there has allowed him to collaborate with other talented professionals, enhancing the development of advanced technologies in semiconductor fabrication.

Collaborations

Some of his notable coworkers include Tai-Kun Kao and Jui-Chun Weng. Their collaborative efforts contribute to the innovative environment at Taiwan Semiconductor Manufacturing Company Limited.

Conclusion

Chen-Chung Li's contributions to ion implantation technology exemplify the importance of innovation in the semiconductor industry. His patent and ongoing work continue to influence the efficiency of semiconductor manufacturing processes.