Company Filing History:
Years Active: 2004-2012
Title: **The Innovative Mind of Charles J Parrish**
Introduction
Charles J Parrish, hailing from Milton, Vermont, is a prominent inventor known for his significant contributions to the field of micro-electromechanical systems (MEMS). With a total of four patents to his name, Parrish has demonstrated a relentless pursuit of innovation, particularly in the area of high aspect ratio structures and photolithographic techniques.
Latest Patents
Parrish's recent work includes groundbreaking patents such as the *MEMS process method for high aspect ratio structures*. This method encompasses techniques for the controlled manufacture of high aspect ratio features by forming a layer stack on a substrate's top surface, where features are defined through a patterned resist layer. Notably, dimensions of these features can be measured at various substrate locations, enabling adjustments to the photolithographic conditions based on real-time data.
Another significant patent involves the *method of photolithographic exposure dose control as a function of resist sensitivity*. This predictive method compensates for intermediate batch sensitivities during resist batch transitions, ensuring optimal dose levels are maintained throughout the process. By leveraging historical data, Parrish's method continuously calculates a batch factor to achieve the correct dose adjustments, thereby preserving image accuracy.
Career Highlights
Charles J Parrish is currently associated with the International Business Machines Corporation (IBM), an organization renowned for its innovative advancements in technology. His work, especially in the realm of MEMS, positions him as a leader in the field, contributing to the development of technologies that power various applications.
Collaborations
Throughout his career, Parrish has collaborated with esteemed colleagues, including Charles Arthur Whiting and Keith J Machia. These partnerships have not only enriched his work experience but have also fostered an environment of collaborative innovation that drives forward-thinking solutions in the industry.
Conclusion
In summary, Charles J Parrish exemplifies what it means to be an innovator in the field of micro-electromechanical systems. His patents reflect a deep understanding of manufacturing processes and a commitment to excellence, solidifying his reputation as a leading inventor. As technology continues to advance, Parrish's contributions will undoubtedly influence future developments in the industry.