This inventor holds 2 USPTO granted patents and 1 EPO patent. Top assignees: Freescale Semiconductor,inc., Motorola Corporation. Active years: 2004-2006.
Company Filing History:
Years Active: 2004-2006
Title: The Innovations of Charles F. King
Introduction
Charles F. King is a notable inventor based in Austin, TX, with a focus on semiconductor technologies. He holds 2 patents that showcase his contributions to the field of patterning methods and reticle manufacturing.
Latest Patents
One of his latest patents is the "Decoupled Complementary Mask Patterning Transfer Method." This innovative method allows for the separate transfer of a complementary reticle set. It involves etching a phase shift mask (PSM) and a cut mask for a complementary PSM. The process includes two decoupled mask patterning steps that form combined patterns through partial image transfers into an intermediate hard mask before final wafer patterning. The materials used for the intermediate and final hard masks are specifically chosen to prevent image transfer into the underlying substrate prior to the final etch process.
Another significant patent is the "Method of Manufacturing Reticles Using Subresolution Test Patterns." This method involves using an optical pattern correction (OPC) test pattern in a first reticle frame, which contains subresolution features that do not appear on the resulting wafer. A first reticle is created, and critical parameters are extracted from it. These parameters are then used to execute an OPC model to generate a modified design, leading to the production of a new reticle. The OPC test pattern is placed in a second reticle frame, and a second reticle is manufactured. The critical parameters from both reticles are compared to ensure they meet predetermined tolerances.
Career Highlights
Throughout his career, Charles F. King has worked with prominent companies such as Motorola Corporation and Freescale Semiconductor, Inc. His experience in these organizations has significantly contributed to his expertise in semiconductor technologies.
Collaborations
Charles has collaborated with notable colleagues, including Tab Allen Stephens and Keith Brankner, who have also made significant contributions to the field.
Conclusion
Charles F. King is a distinguished inventor whose work in semiconductor technologies has led to innovative patents that enhance manufacturing processes. His contributions continue to influence the industry and pave the way for future advancements.