Charles E Wayman

Title: The Innovations of Charles E Wayman

Introduction

Charles E Wayman is a notable inventor based in San Jose, CA. He has made significant contributions to the field of optical inspection systems, holding 2 patents that showcase his innovative techniques. His work primarily focuses on enhancing the accuracy and efficiency of inspection processes in multi-layered specimens.

Latest Patents

One of Wayman's latest patents is the "Slit Confocal Autofocus System." This technique is designed to focus and maintain the focus of an inspection or review system on a specific layer of a multi-layered specimen. In one embodiment, a confocal autofocus system can be utilized to focus an optical inspection system on the top layer of a semiconductor wafer thin-film stack. The system employs a tilted mask with a linear array of apertures or a continuous slit, aligned to create a linear array of focal points parallel to the scanning axis of the inspection system. By processing the profile depth information, the system can determine the depth of various layers in the specimen, allowing for precise focus on the layer of interest.

Another significant patent is the "Surface Inspection System with Misregistration Error Correction." This optical surface inspection system is designed to correct misregistration errors by obtaining a reference vector of data samples through averaging adjacent data sample vectors. By comparing the current vector's data samples to those that may be offset, the system can detect and correct misregistration errors effectively. Additionally, the intensity of the reflection from the inspection beam can be monitored to adjust the inspection beam's intensity, thereby reducing the dynamic range of background scattering.

Career Highlights

Throughout his career, Charles E Wayman has worked with prominent companies such as Kla Tencor Corporation and Kla-Tencor Technologies Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas in optical inspection technology.

Collaborations

Wayman has collaborated with talented individuals in his field, including Mehrdad Nikoonahad and Steve R Lange. These collaborations have contributed to the advancement of his inventions and the overall progress in optical inspection systems.

Conclusion

Charles E Wayman is a distinguished inventor whose work in optical inspection systems has led to significant advancements in the field. His innovative patents reflect his commitment to improving inspection accuracy and efficiency. His contributions continue to influence the industry and inspire future innovations.