Charles A Dark

Title: Innovations by Charles A Dark in Semiconductor Manufacturing

Introduction

Charles A Dark is a notable inventor based in Arlington, TX (US), recognized for his contributions to semiconductor manufacturing. With a total of 13 patents to his name, Dark has made significant advancements in the field, particularly in preventing the formation of vertical bird's beak structures in semiconductor devices.

Latest Patents

Among his latest patents, Dark has developed a system and method for providing a poly cap and a no field oxide area to prevent the formation of a vertical bird's beak structure in the manufacture of a semiconductor device. This innovative approach involves forming a polysilicon filled trench in a substrate and applying composite layers over the trench and substrate. The process includes a mask and etch technique to ensure that no field oxide is placed over the trench, thus preventing the undesired vertical bird's beak structure.

Another significant patent by Dark focuses on providing a nitride cap over a polysilicon filled trench, which similarly prevents the formation of the vertical bird's beak structure. This method utilizes a composite layer stack with a nitride layer as the top layer, followed by a plasma enhanced chemical vapor deposition (PECVD) oxide cap layer. The careful application of these techniques ensures the integrity of the semiconductor device during subsequent processing steps.

Career Highlights

Charles A Dark has built a successful career at National Semiconductor Corporation, where he has been instrumental in developing innovative solutions for semiconductor manufacturing. His work has not only advanced the technology but has also contributed to the efficiency and reliability of semiconductor devices.

Collaborations

Throughout his career, Dark has collaborated with notable colleagues, including William Max Coppock and Andy Strachan. These partnerships have fostered a creative environment that has led to groundbreaking advancements in the semiconductor industry.

Conclusion

Charles A Dark's contributions to semiconductor manufacturing through his innovative patents have significantly impacted the industry. His work continues to influence the development of reliable and efficient semiconductor devices.