National Semiconductor Corporation

Charles A Dark

William Max Coppock

Andy Strachan

Jeffery Lee Nilles

Richard W Foote, Jr

Darren Lee Rust

A system and method is disclosed that prevents the formation of a vertical bird's beak structure in the manufacture of a semiconductor device. A polysilicon filled trench is formed in a substrate of the semiconductor device. One or more composite layers are then applied over the trench and the substrate. A mask and etch process is then applied to etch the composite layers adjacent to the polysilicon filled trench. A field oxide process is applied to form field oxide portions in the substrate adjacent to the trench. Because no field oxide is placed over the trench there is no formation of a vertical bird's beak structure. A gate oxide layer is applied and a protection cap is formed over the polysilicon filled trench to protect the trench from unwanted effects of subsequent processing steps.

System and method for providing a poly cap and a no field oxide area to prevent formation of a vertical bird's beak structure in the manufacture of a semiconductor device

A system and method is disclosed that prevents the formation of a vertical bird's beak structure in the manufacture of a semiconductor device. A polysilicon filled trench is formed in a substrate of the semiconductor device. A composite layer stack is formed over the trench that has a nitride layer as a top layer. A plasma enhanced chemical vapor deposition (PECVD) oxide cap layer is formed over the nitride layer over the trench area. A mask and etch process is then applied to etch the composite layer stack adjacent to the polysilicon filled trench. A field oxide process is applied to form field oxide portions in the substrate adjacent to the trench. Because no field oxide is placed over the trench there is no formation of a vertical bird's beak structure. A gate oxide layer is applied to protect the trench from unwanted effects of subsequent processing steps.

System and method for providing a nitride cap over a polysilicon filled trench to prevent formation of a vertical bird's beak structure in the manufacture of a semiconductor device

A silicide bridged anti-fuse and a method of forming the anti-fuse are disclosed. The silicide bridged anti-fuse can be formed with a tungsten plug metalization process that does not require any additional process steps. As a result, anti-fuses can be added to an electrical circuit as trim elements for no additional cost.

Method of forming a silicide bridged anti-fuse with a tungsten plug metalization process

A method is disclosed for controlling the formation of an interfacial oxide layer in a polysilicon emitter transistor device. The interfacial oxide layer is formed between an underlying substrate of single crystal silicon and an upper layer of polysilicon. The current gain and the emitter resistance of the transistor device are related to the thickness of the interfacial oxide layer. The oxide of the interfacial oxide layer is grown in a low pressure, low temperature pure oxygen (O) environment that greatly reduces the oxidation rate. The low oxidation rate allows the thickness of the interfacial oxide layer to be precisely controlled and sources of variation to be minimized in the manufacturing process.

System and method for controlling the formation of an interfacial oxide layer in a polysilicon emitter transistor

A conductive structure provides a conductive path from a first region in a semiconductor material to a second spaced apart region in the semiconductor material by forming a plurality of trenches between the first and second regions, implanting a dopant into the bottom surfaces of the trenches, and then annealing the wafer to cause the dopant at the bottom surfaces to diffuse and form a continuous conductive path.

Method of forming a conductive structure

A conductive structure provides a conductive path from a first region in a semiconductor material to a second spaced apart region in the semiconductor material by forming one or more trenches between the first and second regions, and implanting a dopant into the bottom surfaces of the trenches to form a continuous conductive path.

Method of forming a conductive structure in a semiconductor material

Conductive structure in a semiconductor material

Silicide bridged anti-fuse

Conductive structure and method of forming the structure

The present invention provides a two-terminal Zener zap diode device structure that relies upon the formation of an anti-fuse through a silicon substrate with the melting and flow of an aluminum alloy to create the current path. The use of oversized contacts in the diode structure permits the Tungsten plug to be eliminated from the diode structure and, thus, permits an aluminum alloy melt and flow mechanism to be used with a Tungsten plug process.

Method of adding Zener zap aluminum bridged anti-fuses to a tungsten plug process

A three-terminal integrated circuit device structure is provided that relies upon the formation of an anti-fuse through a silicon substrate with the melting and flowing of an aluminum/aluminum alloy to create the current path. The use of an oversized contact permits the Tungsten plug to be eliminated from the anti-fuse structure, but allows the aluminum melt and flow mechanism to be used with a Tungsten plug process.

Method of adding bias-independent aluminum bridged anti-fuses to a tungsten plug process

In the monitoring of the consumption of a target of, for example, titanium for providing titanium and/or titanium nitride film, the process work in kilowatt-hours (Y,) is determined for complete consumption of the target when providing only titanium, and the process work in kilowatt-hours (Y,) is also determined for complete consumption of the target in providing only titanium nitride. The target life is then determined in accordance with the formula;

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Arlington, TX, United States of America

Charles A Dark