Changwoo Seo

Title: Changwoo Seo - Innovator in Semiconductor Technology

Introduction

Changwoo Seo is a prominent inventor based in Suwon-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on enhancing semiconductor devices and manufacturing methods, showcasing his expertise and innovative spirit.

Latest Patents

Changwoo Seo's latest patents include a semiconductor device that features contact plug structures on a substrate. This device incorporates an insulation structure that fills the space between the contact plug structures, ensuring they are insulated from one another. The insulation structure consists of a first insulation pattern and a second insulation pattern, with the latter made from a material that has etch selectivity with respect to silicon oxide. Additionally, he has developed a method for manufacturing a semiconductor device that includes an air gap. This method involves loading a semiconductor substrate into a chamber, depositing a seed layer, and applying a protective layer through a series of cycles that utilize various silicon and nitrogen source materials.

Career Highlights

Changwoo Seo is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work at Samsung has allowed him to push the boundaries of semiconductor technology and contribute to advancements in the field.

Collaborations

Throughout his career, Changwoo has collaborated with notable colleagues, including Dain Lee and Yoongoo Kang. These collaborations have further enriched his work and fostered innovation within his projects.

Conclusion

Changwoo Seo is a distinguished inventor whose contributions to semiconductor technology have made a lasting impact. His innovative patents and work at Samsung Electronics Co., Ltd. highlight his dedication to advancing the field.