Chae-mook Lim

Title: Innovations by Inventor Chae-mook Lim

Introduction

Chae-mook Lim is a notable inventor based in Yongin-si, South Korea. He has made significant contributions to the field of technology, particularly in the area of layer deposition methods and extreme ultraviolet (EUV) light concentrating apparatuses. With a total of two patents to his name, Lim's work is recognized for its innovative approach and practical applications.

Latest Patents

Chae-mook Lim's latest patents include a layer deposition method and a layer deposition apparatus. In this method, a substrate is loaded into a process chamber, and a gas filling tank is charged with a gas to a predetermined charge pressure. The pressure of the gas is elevated to a level greater than the predetermined charge pressure before being introduced into the process chamber. His second patent involves an EUV light concentrating apparatus and a lithography apparatus that includes a main body with a concave inner portion designed to rotate. This apparatus features a tin generator that produces tin drops, a tin catcher for processing these drops, a protective cover to block the drops from falling into the main body, and a rotation guide for the main body.

Career Highlights

Chae-mook Lim is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work at Samsung has allowed him to develop and refine his innovative ideas, contributing to the company's reputation for cutting-edge technology.

Collaborations

Lim has collaborated with notable coworkers such as Shin-Jae Kang and Dong-Hoon Han. These partnerships have likely enhanced the development and implementation of his innovative projects.

Conclusion

Chae-mook Lim's contributions to technology through his patents reflect his expertise and innovative spirit. His work continues to influence advancements in the field, showcasing the importance of creativity and collaboration in driving technological progress.