Average Co-Inventor Count = 5.54
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (2 from 132,080 patents)
2 patents:
1. 11840760 - Layer deposition method and layer deposition apparatus
2. 11497109 - EUV light concentrating apparatus and lithography apparatus including the same