Catalin Filip

Title: Innovations by Catalin Filip

Introduction

Catalin Filip is an accomplished inventor based in Pleasanton, CA (US). He has made significant contributions to the field of semiconductor metrology, holding two patents that showcase his innovative approach to technology.

Latest Patents

One of Catalin Filip's latest patents is focused on multiple angles of incidence semiconductor metrology systems and methods. This apparatus includes a bright light source that provides an illumination beam at multiple wavelengths, ranging from deep ultraviolet to infrared. The illumination optics direct the beam towards a sample at selectable angles of incidence and polarization states, enabling spectroscopic ellipsometry. The system also features an apodizer to control the spot size of the illumination beam on the sample, collection optics to direct the output beam towards a detector, and a controller for characterizing features of the sample based on the output signal or image.

Career Highlights

Catalin Filip is currently employed at KLA-Tencor Corporation, a leading company in the semiconductor industry. His work focuses on advancing metrology systems that enhance the precision and efficiency of semiconductor manufacturing processes.

Collaborations

Catalin collaborates with notable colleagues, including David Y. Wang and Klaus Flock, who contribute to the innovative environment at KLA-Tencor Corporation.

Conclusion

Catalin Filip's contributions to semiconductor metrology through his patents and work at KLA-Tencor Corporation highlight his role as a key innovator in the field. His advancements continue to influence the technology landscape significantly.