Kla Tencor Corporation

Catalin Filip

Andrei V Shchegrov

Shankar Krishnan

David Y Wang

Lawrence D Rotter

Gregory Brady

Johannes D De Veer

Klaus Flock

Muzammil A Arain

An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.

Multiple angles of incidence semiconductor metrology systems and methods

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Pleasanton, CA, United States of America

Catalin Filip