Can Xu

Title: Can Xu: Innovator in Plasma Processing Technology

Introduction

Can Xu is a prominent inventor based in San Jose, California. He has made significant contributions to the field of plasma processing technology, holding a total of five patents. His work focuses on improving the efficiency and effectiveness of gas delivery systems used in various processing applications.

Latest Patents

One of Can Xu's latest patents is titled "Apparatus for depositing metal films with plasma treatment." This invention includes a gas delivery apparatus designed for use in a radio frequency (RF) processing apparatus. The apparatus features a conductive gas line with flanges and a block of ferrite material that enhances its functionality. Another notable patent is "Apparatus and methods to remove residual precursor inside gas lines post-deposition." This invention describes a system for supplying gas to a processing chamber, which includes an inlet line, an outlet line, and a bypass line to effectively remove precursor residues from delivery lines.

Career Highlights

Can Xu is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His innovative work has contributed to advancements in manufacturing processes, particularly in the area of thin film deposition.

Collaborations

Throughout his career, Can Xu has collaborated with notable colleagues, including Daping Yao and Jiang Lu. These partnerships have fostered a collaborative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Can Xu's contributions to plasma processing technology and his innovative patents highlight his role as a key inventor in the field. His work continues to influence advancements in manufacturing processes, showcasing the importance of innovation in technology.