Byong-Cheol Park

Title: Byong-Cheol Park: Innovator in Semiconductor Technology

Introduction

Byong-Cheol Park is a prominent inventor based in Suwon-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on innovative methods and apparatuses that enhance the efficiency of semiconductor substrate exposure.

Latest Patents

One of his latest patents is titled "Method and apparatus for exposing semiconductor substrates." This invention provides methods and apparatus for exposing multiple substrates within a single exposing apparatus using only a single light source. A first substrate is exposed in a series of steps or shots, during which light transmitted along a primary optical path is directed onto the primary surface of the substrate, with the substrate being repositioned between sequential shots. A second substrate is exposed while the first substrate is being repositioned by altering the optical path to divert the light from the light source into a secondary optical path that will expose a region on the second substrate. Once the first substrate has been repositioned, the diversion of the light is terminated, allowing the light to again be transmitted along the primary optical path to expose the next sequential shot on the primary surface of the first substrate.

Another notable patent is the "Method of exposing a wafer to a light, and reticle, reticle assembly and exposing apparatus for performing the same." This method involves transferring an image onto a plurality of shot areas by irradiating a projection light. Each of the shot areas includes at least one die area defined on the wafer, on which a photoresist film is formed. The method also includes scanning the die area adjacent to the edge portion of the wafer by irradiating a scanning light.

Career Highlights

Byong-Cheol Park is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics and semiconductor industry. His work at Samsung has allowed him to be at the forefront of technological advancements in semiconductor manufacturing.

Collaborations

Throughout his career, Byong-Cheol Park has collaborated with notable colleagues, including Dong-Hwa Shin and Sang-Ho Lee. These collaborations have contributed to the development of innovative solutions in the semiconductor field.

Conclusion

Byong-Cheol Park is a distinguished inventor whose work in semiconductor technology has led to significant advancements in the industry. His innovative patents and contributions continue to shape the future of