The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2007
Filed:
Dec. 27, 2004
Dong-hwa Shin, Suwon-si, KR;
Byong-cheol Park, Suwon-si, KR;
Sang-ho Lee, Suwon-si, KR;
Sung-wook Park, Suwon-si, KR;
Dong-Hwa Shin, Suwon-si, KR;
Byong-Cheol Park, Suwon-si, KR;
Sang-Ho Lee, Suwon-si, KR;
Sung-Wook Park, Suwon-si, KR;
Samsung Electronics, Co., Ltd., Suwon, KR;
Abstract
A temperature controller for a semiconductor-fabricating tool includes a Peltier element disposed on an outer wall of the semiconductor-fabricating tool, and a battery for providing a current to the Peltier element. The Peltier element a heat-emitting plate for emitting heat by the current provided thereto, and a heat-absorbing plate for absorbing a heat. A first temperature sensor senses a temperature of the Peltier element. A second temperature sensor senses an interior temperature of the semiconductor-fabricating tool. A controller controls an amount of the current provided to the Peltier element in accordance with a temperature of the Peltier element sensed by the first temperature sensor and an interior temperature of the semiconductor-fabricating tool sensed by the second temperature sensor.