Byeoung Tak Kim

Title: Byeoung Tak Kim: Pioneering Innovations in Silicon Nitride Etching

Introduction

Byeoung Tak Kim is an accomplished inventor based in Incheon, South Korea. With two patents to his name, Kim has made significant contributions to the field of semiconductor processing, particularly in the etching of silicon nitride films.

Latest Patents

Kim's latest patents focus on the development of effective etching compositions for silicon nitride films. One of his notable inventions is an etching composition designed for selective wet etching of silicon nitride films. This composition includes an inorganic acid, a silicon-based compound, an ammonium-based compound made up of ammonium acetic acid, and water. The method allows for wet etching at an impressive rate, at least 200 times faster than that of silicon oxide films.

Another significant patent introduces an etchant composition with high selectivity specifically for silicon nitride films. This composition is crucial in semiconductor processes as it selectively etches silicon nitride films at a staggering selectivity of 2000:1 or higher compared to silicon oxide films, thereby minimizing damages during the etching process and preventing re-growth of the silicon oxide film over time.

Career Highlights

Byeoung Tak Kim has been a key player in the field of semiconductor technology. He has worked at prominent companies, including LT CAM Co., Ltd. and SK hynix Inc., where he has applied his expertise in materials science and chemical engineering to advance semiconductor manufacturing processes.

Collaborations

Throughout his career, Kim has collaborated with several industry professionals, including colleagues Sok Ho Lee and Jung Hwan Song. These collaborations have allowed him to enhance his research and development efforts further, leading to his innovative contributions to the technology sector.

Conclusion

With a focus on silicon nitride etching technologies, Byeoung Tak Kim continues to be an influential inventor in the semiconductor field. His efforts demonstrate the critical role of innovations in driving advancements within technology, ensuring more efficient and effective manufacturing processes. Through his patents, Kim not only showcases his technical prowess but also contributes to the continuous improvement of semiconductor technologies.