Location History:
- Suwon-si, KR (2016)
- Hwaseong-si, KR (2022 - 2024)
Company Filing History:
Years Active: 2016-2025
Title: Innovations by Byeongsang Kim
Introduction
Byeongsang Kim is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of plasma processing, holding a total of six patents. His work focuses on advanced methods and apparatuses for measuring and processing plasma parameters.
Latest Patents
Kim's latest patents include a "Method of measuring parameters of plasma," an "Apparatus for measuring parameters of plasma," a "Plasma processing system," and a "Method of processing wafer." The apparatus for measuring plasma parameters features a cutoff probe that includes a first antenna designed to emit microwaves to the plasma, a second antenna that generates an electrical signal in response to the microwaves, and various insulating and protective layers. Additionally, he has developed an "Impedance measurement jig" that allows for the individual measurement of the ESC and focus ring impedances in a substrate-processing apparatus.
Career Highlights
Byeongsang Kim is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in the field of plasma technology. His work has been instrumental in enhancing the efficiency and accuracy of plasma processing systems.
Collaborations
Some of his notable coworkers include Seungbo Shim and Naohiko Okunishi, who have collaborated with him on various projects related to plasma technology.
Conclusion
Byeongsang Kim's contributions to plasma processing technology through his patents and work at Samsung Electronics Co., Ltd. highlight his role as a leading inventor in this field. His innovative approaches continue to advance the capabilities of plasma measurement and processing systems.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.