The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2022
Filed:
May. 04, 2020
Samsung Electronics Co., Ltd., Suwon-si, KR;
Byeongsang Kim, Hwaseong-si, KR;
Keonwoo Kim, Yongin-si, KR;
Eungsu Kim, Seoul, KR;
Hakyoung Kim, Bucheon-si, KR;
Heewon Min, Daejeon, KR;
Kyeongtea Bang, Hwaseong-si, KR;
Seungwon Shin, Seoul, KR;
Dongyun Yeo, Seoul, KR;
Hyanjung Lee, Hwaseong-si, KR;
Kyeongseok Jeong, Hwaseong-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
An electrostatic chuck includes a chuck plate configured to mount a substrate, an insulation pillar provided outside the chuck plate, the insulation pillar having a pin hole formed therein, a first movable ring provided on the insulation pillar, surrounding a side of the chuck plate, a second movable ring configured to cover at least a part of an upper portion of the first movable ring, and a driving pin configured to move in the pin hole of the insulation pillar in a vertical direction, the driving pin overlapped by at least a part of the first movable ring and at least a part of the second movable ring in the vertical direction. The driving pin is configured to drive the first movable ring and the second movable ring in the vertical direction or to drive the second movable ring in the vertical direction.