Company Filing History:
1 out of 26 
2 out of 832,880 Years Active: 1994-2002
Title: Bunya Matsui: Innovator in Semiconductor Processing Technologies
Introduction
Bunya Matsui is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor processing, holding a total of 3 patents. His work focuses on advanced methods and apparatuses for impurity processing in semiconductor substrates.
Latest Patents
Matsui's latest patents include an "Impurity Processing Apparatus and Method for Cleaning Impurity Processing Apparatus." This invention relates to an apparatus designed to process impurities such as phosphorus and boron in semiconductor substrates and films. The apparatus features a chamber with an introduction port for an impurity-containing ion gas, a substrate holder, and a water-containing gas introduction port to enhance the ion injection process.
Another significant patent is the "Plasma Doping System and Plasma Doping Method." This invention addresses the need for a plasma doping system that can handle larger-diameter wafers while introducing impurities at a shallow depth with lower energy levels. The system includes a plasma generation chamber equipped with a high-frequency power source and antennas for generating helicon plasma, along with an impurity introduction chamber and a plasma flow passage/shaping chamber.
Career Highlights
Throughout his career, Bunya Matsui has worked with various companies, including Canon Sales Co., Inc. His expertise in semiconductor technology has positioned him as a key figure in the industry, contributing to advancements in impurity processing techniques.
Collaborations
Matsui has collaborated with notable professionals in the field, including Kazuo Maeda and Kouichi Ohira. These collaborations have further enriched his work and contributed to the development of innovative semiconductor processing technologies.
Conclusion
Bunya Matsui's contributions to semiconductor processing through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative approaches continue to shape the future of semiconductor technology.