Company Filing History:
Years Active: 2016-2020
Title: Innovations by Inventor Brian Terry
Introduction
Brian Terry is an accomplished inventor based in Amesbury, MA (US). He has made significant contributions to the field of semiconductor manufacturing equipment, holding a total of 4 patents. His innovative work focuses on enhancing the efficiency and accuracy of workpiece alignment and temperature control during ion implantation processes.
Latest Patents
One of Brian Terry's latest patents is a "Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner sensor for semiconductor manufacturing equipment." This invention provides a workpiece alignment system that utilizes a light emission apparatus to direct a light beam at various wavelengths along a shallow angle toward a workpiece. The system includes a light receiver apparatus that detects the light beam on the opposite side of the workpiece, allowing for precise positioning based on the amount of light received. Additionally, the sensitivity of the light receiver is adjusted according to the transmissivity of the workpiece, ensuring accurate alignment.
Another notable patent is for "Wafer temperature control with consideration to beam power input." This system maintains the temperature of a workpiece during ion implantation by using a heated chuck to control the temperature effectively. The invention allows for concurrent heating of the workpiece while ions are implanted, ensuring that the desired temperature is maintained with high accuracy throughout the process.
Career Highlights
Brian Terry is currently employed at Axcelis Technologies, Inc., where he continues to develop innovative solutions for the semiconductor industry. His work has significantly impacted the efficiency of ion implantation systems, contributing to advancements in semiconductor manufacturing.
Collaborations
Brian collaborates with talented coworkers, including Armin Huseinovic and Joseph Ferrara, who share his commitment to innovation in the field.
Conclusion
Brian Terry's contributions to semiconductor manufacturing through his patents demonstrate his expertise and dedication to innovation. His work continues to influence the industry, paving the way for more efficient manufacturing processes.