Location History:
- Campbell, CA (US) (2018 - 2019)
- Santa Clara, CA (US) (2014 - 2020)
Company Filing History:
Years Active: 2014-2020
Title: Brian Saxton Underwood: Innovator in Silicon and Oxygen-Containing Films
Introduction
Brian Saxton Underwood is a prominent inventor based in Santa Clara, California. He has made significant contributions to the field of materials science, particularly in the deposition of silicon and oxygen-containing films. With a total of seven patents to his name, Underwood's work has advanced the technology used in various applications.
Latest Patents
Underwood's latest patents include innovative methods for the deposition of silicon and oxygen-containing films without the use of an oxidizer. This process involves introducing siloxane precursors into a plasma processing chamber, where the Si—H bonds of the precursors are dissociated using low energy plasma. This technique allows for the formation of a silicon dioxide film on oxidation-prone surfaces without causing oxidation. Another notable patent describes a photo-assisted method for forming flowable films. In this method, an oxygen-free precursor gas mixture is activated by UV radiation, encouraging molecular fragments to deposit on a substrate to create a flowable film. The film can then be hardened through heating or additional UV exposure.
Career Highlights
Underwood is currently employed at Applied Materials, Inc., a leading company in the semiconductor and materials engineering industry. His work at Applied Materials has positioned him as a key player in the development of advanced deposition techniques that are crucial for modern manufacturing processes.
Collaborations
Some of Underwood's notable coworkers include Abhijit Basu Mallick and Nitin K Ingle. Their collaborative efforts contribute to the innovative environment at Applied Materials, fostering advancements in technology and materials science.
Conclusion
Brian Saxton Underwood's contributions to the field of silicon and oxygen-containing films demonstrate his expertise and innovative spirit. His patents reflect a commitment to advancing technology in materials science, making a lasting impact on the industry.