Company Filing History:
Years Active: 2020-2023
Title: Inventor Spotlight: Brett Herzig
Introduction
Brett Herzig, an accomplished inventor based in San Jose, CA, stands out with a remarkable portfolio of four patents. His innovative contributions primarily focus on enhancing technologies related to plasma balancing and wafer handling systems.
Latest Patents
One of Herzig's latest patents is the Modular Recipe Controlled Calibration (MRCC) apparatus, which plays a crucial role in balancing plasma in a multiple station system. The design features a circuit that includes a low to mid-frequency tuning circuit equipped with a variable LF/MF capacitor and an LF/MF inductor. This circuit is ingeniously coupled between ground and a common node designated to receive an RF input. Moreover, it incorporates a high-frequency tuning circuit that parallels the LF/MF tuning circuit, which includes a variable HF capacitor and an HF inductor, effectively facilitating cross-parallel isolation during tuning adjustments.
Another significant invention by Herzig is the Enhanced Automatic Wafer Centering System. This system employs advanced techniques to accurately determine and correct inter-wafer misalignments in stacks of wafers transported by robotic systems. It utilizes a method to establish the smallest circle associated with a stack of wafers, enabling precise alignment with receiving station coordinate frames while ensuring the wafers meet critical process requirements.
Career Highlights
Brett Herzig's professional journey includes his role at Lam Research Corporation, a leader in the semiconductor manufacturing sector. His focus on innovation has contributed significantly to the company's advancements in semiconductor technology.
Collaborations
Throughout his career, Herzig has collaborated with esteemed colleagues such as Eller Y Juco and Karl Frederick Leeser. These partnerships have fostered a culture of innovation and ensured the development of cutting-edge solutions in their field.
Conclusion
In conclusion, Brett Herzig exemplifies the spirit of innovation through his technological advancements and prolific patent portfolio. His contributions to modular calibration systems and wafer handling techniques underline his status as a leading inventor in the semiconductor industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.