The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2021
Filed:
Sep. 04, 2018
Lam Research Corporation, Fremont, CA (US);
Eller Y. Juco, Tualatin, OR (US);
Karl Frederick Leeser, West Linn, OR (US);
David French, Portland, OR (US);
Sunil Kapoor, Vancouver, WA (US);
Aaron Bingham, Newberg, OR (US);
David Alan Metz, McMinnville, OR (US);
Brett Herzig, San Jose, CA (US);
Jacob L. Hiester, Newberg, OR (US);
Brian Knight, Beaverton, OR (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A circuit tuning radio frequency (RF) power. The circuit includes a low to mid frequency (LF/HF) tuning circuit including a variable LF/MF capacitor coupled in series with an LF/MF inductor. The LF/MF tuning circuit is coupled between ground and a common node configured to receive an RF input. The circuit includes a high frequency (HF) tuning circuit coupled in parallel to the LF/MF tuning circuit between ground and the common node. The HF tuning circuit includes a variable HF capacitor coupled in series with an HF inductor. Cross parallel isolation occurs between the LF/MF inductor of the LF/MF tuning circuit and the HF inductor of the HF tuning circuit when adjusting the variable LF/MF capacitor or variable HF capacitor.