Location History:
- Bedford, MA (US) (1987 - 1991)
- Arlington, MA (US) (1983 - 1992)
Company Filing History:
Years Active: 1983-1992
Title: **The Innovative Work of Bor-Yeu Tsaur in Semiconductor Technology**
Introduction
Bor-Yeu Tsaur, an accomplished inventor based in Bedford, MA, has made significant contributions to the field of semiconductor technology. With a portfolio that includes 10 patents, Tsaur is renowned for her innovative methods that enhance the quality of semiconductor materials.
Latest Patents
One of her latest patents focuses on **reducing dislocations in semiconductors utilizing repeated thermal cycling**. This technique reduces dislocation densities in growing semiconductors from the vapor phase by employing a process of interrupting growth, cooling the layer that has already been deposited, and then repeating this process. The aim is to achieve a high-quality active top layer, effectively trapping dislocations during the early stages of epitaxial growth.
Another significant patent involves the **capping technique for zone-melting recrystallization of insulated silicon-on-insulator (SOI)** films. This method enhances the wetting of encapsulated SOI films during the zone-melting recrystallization (ZMR) process by performing a high-temperature anneal of the SOI structure in a reactive nitrogen-containing environment. This innovative approach improves crystal quality and is suitable for batch processing with noncritical parameters, resulting in efficient and uniform production.
Career Highlights
Tsaur's career at the Massachusetts Institute of Technology has positioned her as a leader in semiconductor research. She has actively worked on developing techniques that not only enhance the performance of semiconductor materials but also make the manufacturing processes more efficient.
Collaborations
Throughout her career, Bor-Yeu Tsaur has collaborated with esteemed colleagues, including John C. Fan and Michael W. Geis. These collaborations have contributed to the success of her innovative work and the advancement of semiconductor technology.
Conclusion
Bor-Yeu Tsaur stands out as a prominent inventor whose work in semiconductor technology has paved the way for advancements in the industry. Her innovative patents reflect her commitment to improving the quality and efficiency of semiconductor materials, ensuring her place among the leading figures in her field.