Björn Liebaug

Title: Björn Liebaug: Innovator in Lithography Technology

Introduction

Björn Liebaug is a notable inventor based in Ulm, Germany. He has made significant contributions to the field of lithography, particularly in the development of advanced beam-forming and illuminating systems. With a total of 2 patents, his work has been instrumental in enhancing the capabilities of lithography systems.

Latest Patents

Liebaug's latest patents include a "Beam-forming and illuminating system for a lithography system" and a "Lithography apparatus and method." The beam-forming and illuminating system is designed for use in EUV lithography systems. It features an optical element and an adjusting device that measures and adjusts the orientation and position of the optical element during the heat-up phase. This innovation ensures that the optical element remains in a desired position, enhancing the system's performance. The lithography machine patent describes a configuration where an optical element is directly connected to an interface, allowing for a form-fitting and force-fitting connection with a separate component.

Career Highlights

Björn Liebaug is currently employed at Carl Zeiss SMT GmbH, a leading company in optical systems and lithography technology. His work at this esteemed organization has allowed him to push the boundaries of what is possible in lithography.

Collaborations

Throughout his career, Liebaug has collaborated with notable colleagues such as Hubert Holderer and Klaus Abele. These partnerships have contributed to the advancement of lithography technologies and innovations.

Conclusion

Björn Liebaug's contributions to lithography technology through his patents and work at Carl Zeiss SMT GmbH highlight his role as a key innovator in the field. His advancements continue to influence the industry and pave the way for future developments.