Bjorn O Pedersen

Title: The Innovations of Bjorn O Pedersen

Introduction

Bjorn O Pedersen is a notable inventor based in Chelmsford, MA (US). He holds a total of 7 patents that showcase his contributions to the field of ion sources and plasma technology. His work has significantly impacted various industries, particularly in semiconductor manufacturing.

Latest Patents

One of his latest inventions is the indirectly heated cathode ion source. This innovative device includes an arc chamber housing that defines an arc chamber, an indirectly heated cathode, and a filament for heating the cathode. The design features an emitting portion with a front surface, a rear surface, and a periphery, along with a support rod and a skirt extending from the emitting portion. The cathode assembly is designed to maintain a fixed spatial relationship between the cathode and the filament while conducting electrical energy. Additionally, the ion source incorporates a shield to inhibit the escape of electrons and plasma from the arc chamber.

Another significant patent is the Faraday dose and uniformity monitor for plasma-based ion implantation. This device features a magnetically suppressed annular Faraday cup that surrounds a target wafer. It includes a narrow aperture to reduce discharges and a continuous cross-section to eliminate discharge breaks. The monitor can measure current density at different radii to track changes in plasma uniformity. The magnetic suppression field is designed to minimize plasma and implant perturbations, enhancing the accuracy of the measurements.

Career Highlights

Bjorn O Pedersen has worked with prominent companies such as Varian Semiconductor Equipment Associates, Inc. and Varian Associates, Inc. His experience in these organizations has allowed him to develop and refine his innovative technologies, contributing to advancements in the semiconductor industry.

Collaborations

Throughout his career, Bjorn has collaborated with talented individuals, including Bon-Woong Koo and Jay Thomas Scheuer. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Bjorn O Pedersen's contributions to the field of ion sources and plasma technology are noteworthy. His innovative patents and collaborations have significantly advanced the semiconductor industry. His work continues to inspire future innovations in the field.