Company Filing History:
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Years Active: 2019-2023
Title: Binni Varghese: Innovator in Extreme Ultraviolet Technology
Introduction
Binni Varghese is a prominent inventor based in Singapore, known for his contributions to the field of extreme ultraviolet (EUV) technology. With a total of 4 patents to his name, Varghese has made significant advancements in the development of EUV mask blanks and reflective materials.
Latest Patents
Varghese's latest patents include innovative methods and materials for extreme ultraviolet mask blanks. One of his notable inventions involves multilayer extreme ultraviolet reflector materials, which disclose production systems and methods aimed at increasing multilayer film reflectance. These EUV mask blanks consist of a bilayer film on a substrate, where the first film layer includes silicon (Si), and the second film layer comprises elements such as ruthenium (Ru), nickel (Ni), cobalt (Co), tungsten (W), iron (Fe), titanium (Ti), and their silicides. Additionally, some EUV mask blanks feature a multilayer reflective stack with alternating layers on the bilayer film and a capping layer on top. Another patent focuses on extreme ultraviolet mask blank defect reduction methods, detailing a process for forming an EUV mask blank within a multi-cathode PVD chamber.
Career Highlights
Throughout his career, Binni Varghese has worked with notable organizations, including Applied Materials, Inc. and the Agency for Science, Technology and Research. His expertise in EUV technology has positioned him as a key player in the industry, contributing to advancements that are critical for the future of semiconductor manufacturing.
Collaborations
Varghese has collaborated with talented individuals in his field, including Vibhu Jindal and Wen Xiao. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Binni Varghese's work in extreme ultraviolet technology showcases his dedication to innovation and excellence. His patents reflect a deep understanding of complex materials and processes, making him a significant figure in the realm of semiconductor technology.
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