Biao Wu

Title: The Innovative Contributions of Biao Wu in Semiconductor Technology

Introduction

Biao Wu is a notable inventor based in Milpitas, California, with a rich background in semiconductor technology. Throughout his career, he has amassed a total of two patents that showcase his innovative approaches to critical processes in the manufacturing industry. His work significantly contributes to the advancement of semiconductor fabrication and wafer reclamation techniques.

Latest Patents

Biao Wu's latest patents include two notable inventions:

1. **Rinsing Processes and Equipment**: This patent describes methods for rinsing and processing devices such as semiconductor wafers. It introduces the use of a surface tension reducing agent during the rinsing phase, and it may involve a subsequent drying step utilizing the same agent. The methods can be executed using automated rinsing equipment, which emphasizes efficiency and precision in semiconductor manufacturing.

2. **Compositions and Methods for the Selective Etching of Tantalum-Containing Films for Wafer Reclamation**: This invention provides advanced methods for selectively stripping tantalum-containing films from oxide surfaces. It utilizes an etching composition that includes a fluoride ion source and an acidic oxidant, demonstrating a high degree of selectivity. This approach ensures that the underlying oxide surface remains protected during the etching process, operating effectively at ambient temperatures, thereby minimizing safety concerns during manufacturing.

Career Highlights

Biao Wu is employed at FSI International, Inc., a company recognized for its advancements in semiconductor cleaning and processing technologies. His role involves leveraging his expertise to innovate and enhance processes integral to the semiconductor industry.

Collaborations

Throughout his career, Biao Wu has collaborated with esteemed colleagues including Kurt Karl Christenson and Steven L Nelson. These partnerships have facilitated the exchange of ideas and expertise, further driving innovations in their respective fields.

Conclusion

Biao Wu's contributions to semiconductor technology through his patents on rinsing processes and etching compositions underscore his role as a key innovator in the industry. His work not only enhances existing processes but also paves the way for safer and more efficient manufacturing techniques. As technology continues to evolve, the impact of inventors like Biao Wu remains invaluable.