This inventor holds 2 USPTO granted patents and 10 published patent applications. Top assignee: Entegris, Inc.. Active years: 2025.
Company Filing History:
Years Active: 2025
Title: The Innovative Contributions of Benjamin R. Garrett
Introduction
Benjamin R. Garrett is a notable inventor based in Leander, Texas. He has made significant contributions to the field of technology, particularly in the area of precursor delivery systems and the deposition of molybdenum-containing films. With a total of 2 patents to his name, Garrett's work has implications for various applications in microelectronics.
Latest Patents
Garrett's latest patents include "Systems and methods for controlling precursor delivery" and "Methods of preparing molybdenum-containing films." The first patent describes a system that comprises a precursor delivery vessel in fluid communication with a gas flow line. This vessel contains at least one tray with a vaporizable precursor, and thermal energy is supplied to vaporize the precursor. The vaporized precursor is then dispensed into the gas flow line, with the thermal energy adjusted to maintain the pressure within a specific range. The second patent outlines a process for depositing a molybdenum-containing film onto a microelectronic device substrate. This involves exposing the substrate to a specific compound under vapor deposition conditions, resulting in the formation of a molybdenum-containing film.
Career Highlights
Garrett is currently employed at Entegris, Inc., where he continues to innovate and develop new technologies. His work has been instrumental in advancing the capabilities of precursor delivery systems and enhancing the quality of thin films used in microelectronics.
Collaborations
Throughout his career, Garrett has collaborated with talented individuals such as Michael Watson and Pei Zhao. These collaborations have contributed to the successful development of his patented technologies.
Conclusion
Benjamin R. Garrett's innovative work in precursor delivery systems and molybdenum film deposition showcases his significant contributions to technology. His patents reflect a commitment to advancing the field of microelectronics, and his collaborations further enhance the impact of his inventions.