The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2025
Filed:
Nov. 07, 2022
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Benjamin R. Garrett, Leander, TX (US);
Michael Watson, Leander, TX (US);
Pei Zhao, Leander, TX (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/16 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/16 (2013.01); C23C 16/45553 (2013.01);
Abstract
A process for depositing a molybdenum-containing film onto a microelectronic device substrate, which comprises exposing the substrate, in a reaction zone, to a compound of Formula (I) under vapor deposition conditions, thereby forming a molybdenum-containing film on the substrate. The molybdenum-containing films include one or more of molybdenum metal, molybdenum oxide, molybdenum carbide, and molybdenum nitride.
Garrett, Benjamin. (2025). Methods of preparing molybdenum-containing films (U.S. Patent No. 12297531). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12297531
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile