Company Filing History:
2 out of 641 
1 out of 1,787 
Years Active: 2006-2009
Title: The Innovative Contributions of Ben Tsai
Introduction
Ben Tsai is a notable inventor based in Saratoga, CA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on enhancing the precision and reliability of photolithographic tools used in semiconductor manufacturing.
Latest Patents
One of Ben Tsai's latest patents is titled "Apparatus and methods for optically monitoring the fidelity of patterns produced by photolithographic tools." This invention discloses methods for monitoring characteristics associated with product features on semiconductor products. It involves a proxy target formed from substructures that correspond to product features, which are not individually resolvable by optical tools. The characteristic of the proxy target is determined through optical monitoring, allowing for the assessment of whether the corresponding product feature meets predetermined specifications.
Another significant patent is related to "Overlay error detection." In this invention, an overlay target with gratings is illuminated, and the scattered radiation is imaged onto detectors. By detecting the phase difference between the outputs of the detectors, misalignment errors can be identified. This method employs medium numerical aperture optics to enhance measurement accuracy, allowing for simultaneous measurement of structures at different elevations.
Career Highlights
Ben Tsai has worked with prominent companies in the semiconductor industry, including KLA-Tencor Technologies Corporation and KLA Tencor Corporation. His experience in these organizations has contributed to his expertise in developing innovative solutions for semiconductor manufacturing challenges.
Collaborations
Throughout his career, Ben has collaborated with talented individuals such as Mehrdad Nikoonahad and Guoheng Zhao. These collaborations have further enriched his work and contributed to advancements in the field.
Conclusion
Ben Tsai's innovative contributions to semiconductor technology demonstrate his commitment to enhancing manufacturing processes. His patents reflect a deep understanding of the complexities involved in photolithography and overlay error detection. Through his work, he continues to influence the industry positively.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.