Location History:
- Chu-Tong, TW (1995)
- Hsin-chu, TW (1994 - 1999)
Company Filing History:
Years Active: 1994-1999
Title: **Innovator Spotlight: Ben Chen from Hsin-chu, Taiwan**
Introduction
Ben Chen is an accomplished inventor based in Hsin-chu, Taiwan, with a remarkable portfolio of five patents. His work primarily focuses on improving semiconductor processes, enhancing both efficiency and accuracy in various applications.
Latest Patents
Among his latest innovations are two noteworthy patents that reflect his expertise in the field.
1. **Method for probing the error of energy and dosage in the high-energy ion**
This patent discloses a novel method for identifying errors in ion implantation, which is crucial in semiconductor manufacturing. It utilizes a thermal probe to measure signals from ion-induced damage, allowing for precise error determination in energy or dosage during the implantation process. This enables the semiconductor industry to achieve higher yields by mitigating the risks associated with non-normal implant conditions.
2. **Apparatus for adjusting a gas injector of furnace**
Ben has also developed an improved apparatus designed to optimize the adjustment of gas injectors in furnaces used for oxidation, diffusion, and heat treatment in semiconductor processing. This invention enhances the efficiency of the gas delivery system by ensuring precise control over the reaction environment.
Career Highlights
Ben Chen currently works for United Microelectronics Corporation, a leading semiconductor manufacturing company. His contributions have significantly advanced the company's capabilities in semiconductor processing, particularly in ion implantation techniques.
Collaborations
Working alongside notable colleagues such as Water Lur and Cheng H Huang, Ben has fostered a collaborative environment that encourages innovation and the exchange of ideas. This teamwork has been pivotal in enhancing the successful implementation of their research projects.
Conclusion
In summary, Ben Chen stands out as a key innovator in the semiconductor industry, with a keen focus on resolving critical challenges in ion implantation and gas injection processes. His work not only propels United Microelectronics Corporation forward but also contributes significantly to the broader field of semiconductor technology.