Bayu Thedjoisworo

Title: Innovations by Bayu Thedjoisworo

Introduction

Bayu Thedjoisworo is a notable inventor based in San Jose, CA (US). He has made significant contributions to the field of semiconductor processing, holding a total of 5 patents. His work focuses on improving device integrity and cleaning processes for high-aspect ratio structures.

Latest Patents

One of his latest patents is titled "Photoresist strip processes for improved device integrity." This patent describes methods and apparatus for hydrogen-based photoresist strip operations that aim to reduce dislocations in silicon wafers or other substrates. The techniques outlined include minimizing the hydrogen budget, providing dilute hydrogen concentrations, controlling process conditions, and performing post-strip venting processes.

Another significant patent is "Contact clean in high-aspect ratio structures." This invention details a method and apparatus for cleaning substrates with high-aspect ratio openings. The process involves using a plasma processing chamber to etch silicon oxide layers and underlying damaged silicon layers using fluorine-based and hydrogen-based species, respectively.

Career Highlights

Bayu has worked with prominent companies in the semiconductor industry, including Novellus Systems Incorporated and Lam Research Corporation. His experience in these organizations has contributed to his expertise in developing innovative solutions for semiconductor manufacturing.

Collaborations

Some of his notable coworkers include David Wingto Cheung and Joon Hong Park. Their collaboration has likely fostered a creative environment that encourages innovation and the development of advanced technologies.

Conclusion

Bayu Thedjoisworo's contributions to semiconductor processing through his patents and career experiences highlight his role as a significant inventor in the field. His innovative approaches continue to influence the industry and improve device manufacturing processes.