Location History:
- Burghausen, DE (2021 - 2023)
- Munich, DE (2024)
Company Filing History:
Years Active: 2021-2025
Title: Innovations by Axel Beyer in Semiconductor Technology
Introduction
Axel Beyer is a prominent inventor based in Burghausen, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on methods and systems that enhance the production and processing of semiconductor wafers.
Latest Patents
Among his latest patents is a method, control system, and system for machining a semiconductor wafer. This invention relates to an epitaxially coated semiconductor wafer, which is processed using a method where the wafer is placed on a susceptor in a coating apparatus. During the etching step, an etching gas is passed through the apparatus. A protective layer is applied to either side of the wafer before processing, resulting in exceptional geometry and low ESFQR values. Another notable patent involves a method for producing semiconductor wafers using a wire saw. This process includes feeding a workpiece through an arrangement of wires that create kerfs as they engage the workpiece. The invention compensates for placement errors of the kerfs, ensuring precision during the production of monocrystalline silicon wafers.
Career Highlights
Axel Beyer is currently associated with Siltronic AG, a leading company in the semiconductor industry. His innovative approaches have significantly impacted the efficiency and quality of semiconductor wafer production.
Collaborations
He has collaborated with notable coworkers, including Stefan Welsch and Christof Weber, contributing to advancements in semiconductor technologies.
Conclusion
Axel Beyer's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the industry and improve manufacturing processes.