Avinash Ishwar Shervegar

Title: Avinash Ishwar Shervegar: Innovator in Semiconductor Processing Technology

Introduction

Avinash Ishwar Shervegar is a notable inventor based in San Jose, California. He has made significant contributions to the field of semiconductor processing, holding two patents that showcase his innovative approach to technology.

Latest Patents

Shervegar's latest patents include a method and apparatus for processing semiconductor substrates, specifically focusing on in-situ epi growth rate control of crystal thickness micro-balancing sensors. This apparatus features growth monitors within the exhaust system of a deposition chamber, utilizing quartz crystal film thickness monitors to measure the film thickness during substrate processing. The growth monitors are connected to a controller that adjusts heating and gas flow settings based on real-time measurements.

Another significant patent is for a microwave plasma source designed for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tools. This invention includes plasma source assemblies and gas distribution assemblies, which are essential for generating plasma in semiconductor manufacturing.

Career Highlights

Avinash Shervegar is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work focuses on advancing technologies that improve the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Throughout his career, Shervegar has collaborated with esteemed colleagues, including Jozef Kudela and Tsutomu Tanaka. These collaborations have contributed to the development of innovative solutions in semiconductor technology.

Conclusion

Avinash Ishwar Shervegar is a prominent figure in the semiconductor industry, recognized for his innovative patents and contributions to technology. His work continues to influence the field, paving the way for advancements in semiconductor processing.