Avijit K Ray-Chaudhuri

Title: Avijit K Ray-Chaudhuri: Innovator in Defect Detection and Wafer Inspection

Introduction:

Avijit K Ray-Chaudhuri is a highly skilled innovator based in San Ramon, California (US), who has made significant contributions in the field of defect detection and classification. With two patents to his name and an illustrious career working in renowned companies such as KLA Tencor Corporation and KLA-Tencor Technologies Corporation, Ray-Chaudhuri has left a lasting impact on the field of wafer inspection systems.

Patent 1: Defect Detection and Classification Based on Attributes from a Standard Reference Image

One of Avijit K Ray-Chaudhuri's latest patents is centered around systems and methods for classifying defects detected on a wafer. This method involves detecting defects on a wafer using an inspection system and determining attributes for each defect based on portions of a standard reference image corresponding to those defects. By leveraging these attributes, defects can be accurately classified, allowing for effective quality control in wafer production.

Patent 2: Fourier Filters and Wafer Inspection Systems

Ray-Chaudhuri's second patent focuses on Fourier filters and their application in wafer inspection systems. Specifically, the patent describes a one-dimensional Fourier filter designed to enable bright field inspection systems to perform high-quality, broadband dark field inspection of wafers. The innovative filter includes an asymmetric illumination aperture and an asymmetric imaging aperture that work together to block unwanted light reflections and diffracted structures on the wafer, while allowing scattered light from defects to pass through. This advancement improves the accuracy and efficiency of wafer inspection processes.

Career and Collaborations:

Throughout his career, Avijit K Ray-Chaudhuri has collaborated with talented professionals in the field. Some of his notable coworkers include Lisheng Gao and Raghav Babulnath, who have contributed alongside him to the advancements in defect detection and wafer inspection systems.

Conclusion:

Avijit K Ray-Chaudhuri's innovative contributions to the field of defects detection, classification, and wafer inspection have greatly impacted the semiconductor industry. With his patents and successful collaborations with esteemed colleagues, Ray-Chaudhuri continues to play a vital role in advancing quality control measures in wafer production. His work has undoubtedly paved the way for more accurate and efficient inspection systems, ensuring the continued growth and development of the semiconductor industry as a whole.