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Nirasaki, Japan

Atsushi Ueda

USPTO Granted Patents = 5

Average Co-Inventor Count = 2.2

ph-index = 3

Forward Citations = 452(Granted Patents)

Location History:

Amagasak-shi, JP (2008)
Amagasaki, JP (2009)
Nirasaki, JP (2012 - 2015)

Company Filing History:

5 out of 10,341

Tokyo Electron Limited

Years Active: 2008-2015

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8961735 - Plasma processing apparatus and microwave introduction device (2015-02-24),

2. D658693 - Liner for plasma processing apparatus (2012-05-01),

3. D658691 - Liner for plasma processing apparatus (2012-05-01),

4. D589034 - Microwave introducing antenna for a plasma processing apparatus (2009-03-24),

5. D583395 - Cover for a heater stage of a plasma processing apparatus (2008-12-23),

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