Company Filing History:
Years Active: 2018-2021
Title: Atsuhito Ihori: Innovator in Film-Forming Technology
Introduction
Atsuhito Ihori is a prominent inventor based in Chigasaki, Japan. He has made significant contributions to the field of film-forming technology, holding a total of five patents. His work focuses on developing advanced apparatuses and methods for substrate processing.
Latest Patents
One of his latest patents is a film-forming apparatus that includes a target containing a magnetic material and a support that positions a substrate in an arrangement region opposing the target. This innovative apparatus features a magnetic field formation unit that creates a horizontal magnetic field parallel to the oscillation direction, enhancing the film formation process. Another notable patent is a substrate processing device that comprises a housing connected to ground, a cathode stage for supporting a substrate, and an anode unit. This device is designed to generate plasma and facilitate gas flow through strategically placed holes, optimizing substrate processing efficiency.
Career Highlights
Atsuhito Ihori has built a successful career at Ulvac, Inc., where he continues to push the boundaries of technology in his field. His expertise in film-forming methods has positioned him as a key player in the industry, contributing to advancements that benefit various applications.
Collaborations
Throughout his career, Ihori has collaborated with talented individuals such as Masahiro Matsumoto and Harunori Iwai. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Atsuhito Ihori's contributions to film-forming technology exemplify his dedication to innovation and excellence. His patents reflect a commitment to advancing substrate processing methods, making a lasting impact in the field.