Leuven, Belgium

Antonio Mani


Average Co-Inventor Count = 5.5

ph-index = 2

Forward Citations = 9(Granted Patents)


Company Filing History:


Years Active: 2020-2023

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4 patents (USPTO):

Title: The Innovations of Antonio Mani: A Pioneer in Semiconductor Manufacturing

Introduction: Antonio Mani is a distinguished inventor based in Leuven, Belgium. With a remarkable portfolio of four patents, he has made significant contributions to the field of semiconductor manufacturing. His innovative techniques have helped streamline processes and ensure precision in device fabrication.

Latest Patents: One of Antonio Mani's latest patents focuses on the measurement of overlay error using a device inspection system. This method and system involve capturing an image of a feature in an article during a predetermined manufacturing stage. The process derives a quantity of an image parameter from the captured image and converts this quantity into an overlay measurement. The conversion references an image parameter quantity derived from a reference image of a feature at the same manufacturing stage, which already has a known overlay (OVL). Additionally, this patent outlines a method for determining a device inspection recipe for inspection tools, whereby device patterns are identified as candidate areas sensitive to overlay errors. The derived OVL response for each pattern is then correlated with the measured OVL to select the appropriate device care areas.

Career Highlights: Antonio is a key player at KLA-Tencor Corporation, a company renowned for its innovations in photonics and semiconductor manufacturing technology. His work in the company solidifies his role as an influential figure in the industry, contributing to advancements that enhance device quality and manufacturing efficiency.

Collaborations: Throughout his career, Antonio Mani has had the privilege of collaborating with talented individuals such as Choon Hoong Hoo and Fangren Ji. These collaborations have undoubtedly enriched his work, arising from the fusion of different perspectives and expertise in the field.

Conclusion: Antonio Mani's innovative spirit and technical expertise continue to inspire advancement within the semiconductor manufacturing sector. His latest patents demonstrate a commitment to enhancing production processes, ensuring device precision, and ultimately contributing to the progression of technology in the industry.

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