Company Filing History:
Years Active: 1999-2001
Title: The Innovative Contributions of Andrew Conners
Introduction
Andrew Conners is a notable inventor based in Los Gatos, CA. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 3 patents. His work focuses on improving gap-fill capabilities, which is crucial for the advancement of semiconductor technology.
Latest Patents
One of Andrew's latest patents is titled "Method and apparatus for improving gap-fill capability using chemical and physical etchbacks." This invention describes a method and apparatus for depositing a dielectric layer to fill in gaps between adjacent metal lines. In preferred embodiments, a first dielectric layer is deposited over the lines and subsequently etched using both chemical and physical etchback steps. After completing the etchback steps, a second dielectric layer is deposited over the first layer to fill in the gap.
Another significant patent is the "Method for submicron gap filling on a semiconductor substrate." This semiconductor manufacturing process enhances gap fill capabilities through a three-step process of FSG deposition, etchback, and FSG deposition. A first layer of FSG is partially deposited over a metal layer, followed by an argon sputter etchback step to remove excess deposition material. Finally, a second layer of FSG is deposited to complete the gap fill process.
Career Highlights
Andrew Conners is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His innovative work has contributed to the development of advanced manufacturing processes that enhance the efficiency and effectiveness of semiconductor production.
Collaborations
Andrew has collaborated with talented coworkers, including Soonil Hong and Choon Kun Ryu. Their combined expertise has fostered an environment of innovation and creativity within their projects.
Conclusion
Andrew Conners is a distinguished inventor whose contributions to semiconductor manufacturing have made a significant impact on the industry. His patents reflect a commitment to innovation and improvement in technology.