Company Filing History:
Years Active: 2006
Title: **Innovator Spotlight: Ananthanarayanan Mohan**
Introduction
Ananthanarayanan Mohan is an accomplished inventor based in Santa Clara, California, known for his significant contributions to the field of semiconductor technology. With a focus on improving measurement stability in photolithography processes, his work has implications for the manufacturing of advanced integrated circuits.
Latest Patents
Mohan holds a patent titled "Methods of stabilizing measurement of ArF resist in CD-SEM." This innovative method enhances the stability of critical dimension scanning electron microscopy (CD-SEM) measurements, particularly for 193 nm photoresist. The invention addresses the challenge of photoresist shrinkage during measurements by exposing the material to a dose of electrons or other stabilizing beams, improving the integrity of the measurements. Notably, one embodiment of the patent includes the multiplexing of the scanning electron microscope (SEM) electron beam, further advancing measurement accuracy.
Career Highlights
Ananthanarayanan Mohan is currently employed at KLA-Tencor Technologies Corporation, a leader in process control and yield management solutions for the semiconductor industry. His role at KLA-Tencor has enabled him to leverage his expertise in photolithography and measurement technology, contributing to the advancement of semiconductor manufacturing.
Collaborations
Mohan has collaborated with esteemed coworkers Amir Azordegan and Gian Francesco Lorusso, both of whom are experienced professionals in the semiconductor field. Their collective efforts in research and development have played a pivotal role in refining measurement techniques within the industry.
Conclusion
Ananthanarayanan Mohan's contributions to semiconductor technology exemplify the innovative spirit that drives progress in the field. With his patent addressing critical challenges in measurement stability and his work at KLA-Tencor Technologies Corporation, he continues to impact the future of semiconductor manufacturing positively.