Company Filing History:
Years Active: 2019
Title: Amishkumar Panchal: Innovator in Semiconductor Lithography
Introduction
Amishkumar Panchal is a notable inventor based in Aalen, Germany. He has made significant contributions to the field of semiconductor lithography, particularly through his innovative patent that enhances the thermal robustness of projection exposure apparatuses.
Latest Patents
Amishkumar holds a patent for a "Projection exposure apparatus for semiconductor lithography with increased thermal robustness." This invention includes a light source that generates optical used radiation, allowing structures on a reticle to be imaged onto a wafer. The apparatus features multiple optical elements for guiding and manipulating the radiation, as well as position sensors to determine the positions of these optical elements. Notably, some of the position sensors are arranged on a measurement structure that is mechanically and thermally decoupled from other components, enhancing the apparatus's performance.
Career Highlights
Amishkumar is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and semiconductor manufacturing. His work focuses on advancing technologies that improve the efficiency and effectiveness of lithography processes.
Collaborations
Amishkumar collaborates with talented professionals in his field, including Alireza Akbarinia and Alexandre Kemp. Their combined expertise contributes to the innovative projects at Carl Zeiss SMT GmbH.
Conclusion
Amishkumar Panchal's contributions to semiconductor lithography through his innovative patent demonstrate his commitment to advancing technology in this critical field. His work continues to influence the industry positively.