Company Filing History:
Years Active: 1999-2003
Title: The Innovative Contributions of Allen Flanigan
Introduction
Allen Flanigan is a prominent inventor based in San Jose, CA, known for his significant contributions to the field of semiconductor technology. With a total of 12 patents to his name, Flanigan has made remarkable advancements that enhance the efficiency and effectiveness of wafer processing.
Latest Patents
Among his latest patents is the "Thermal exchanger for a wafer chuck." This invention discloses a thermal exchanger assembly designed for a wafer chuck, featuring complimentary manifolds with interleaved spaced-apart fins. The design includes at least one thermo-electric device positioned between alternating pairs of fins, providing a thermally conductive path between the manifolds. This assembly is particularly useful in process chambers for processing semiconductor wafers. Another notable patent is the "Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck." This invention outlines a method for creating a wafer spacing mask using a central body with multiple apertures positioned atop a workpiece support chuck, allowing for precise material deposition.
Career Highlights
Flanigan has worked with several notable companies throughout his career, including Applied Materials, Inc. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.
Collaborations
Throughout his career, Flanigan has collaborated with talented individuals such as Vincent E Burkhart and Steven Victor Sansoni. These collaborations have likely fostered an environment of innovation and creativity, leading to the development of groundbreaking technologies.
Conclusion
Allen Flanigan's contributions to the field of semiconductor technology through his patents and collaborations highlight his role as a key innovator. His work continues to influence advancements in wafer processing and related technologies.