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For the Inventor, By the Inventor

Wenham, MA, United States of America

Alfred Mike Halling

This inventor holds 3 USPTO granted patents. Top assignee: Axcelis Technologies, Inc.. Active years: 2006-2019.

USPTO Granted Patents = 3

% Patents Active = 33.3

Average Co-Inventor Count = 1.2

ph-index = 2

Forward Citations = 4(Granted Patents)


Company Filing History:

goldMedal3 out of 406 
 
Axcelis Technologies, Inc.
 patents

Years Active: 2006-2019

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3 patents (USPTO):Explore Patents
1. 10395889 - In situ beam current monitoring and control in scanned ion implantation systems (2019-08-27),
2. 7692164 - Dose uniformity correction technique (2010-04-06),
3. 6984832 - Beam angle control in a batch ion implantation system (2006-01-10),
Profile summary based on public USPTO records.
Please report any incorrect information to [email protected]
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