Company Filing History:
Years Active: 2010
Title: Alexei Salnik: Innovator in Semiconductor Metrology
Introduction
Alexei Salnik is a prominent inventor based in San Jose, California. He has made significant contributions to the field of semiconductor metrology, holding 2 patents that enhance measurement techniques in this critical area of technology.
Latest Patents
One of his latest patents is the "Combined Modulated Optical Reflectance and Photoreflectance System." This innovative system merges the capabilities of Modulated Optical Reflectance (MOR) technology with the sensitivity of the PhotoReflectance (PR) method. This combination allows for improved stress and other measurements in semiconductor samples, enhancing the performance of MOR-based systems in ion implant applications. It also expands the system's capabilities into measuring structural parameters, such as strain in silicon wafers.
Another notable patent is the "Ion Implant Metrology System with Fault Detection and Identification." This system measures samples subjected to ion implantation using a modulated optical reflectance system. The results are compared to specification ranges for acceptable samples, allowing for quick identification of fault types associated with different known implantation issues. This innovation enables rapid fault detection and correction, improving the reliability of semiconductor manufacturing processes.
Career Highlights
Alexei Salnik is currently employed at KLA-Tencor Corporation, a leading company in the semiconductor industry. His work focuses on advancing measurement technologies that are essential for the production of high-quality semiconductor devices.
Collaborations
Throughout his career, Alexei has collaborated with talented individuals such as Lena Nicolaides and Bin-Ming Benjamin Tsai. These collaborations have contributed to the development of innovative solutions in semiconductor metrology.
Conclusion
Alexei Salnik's contributions to semiconductor metrology through his patents and work at KLA-Tencor Corporation highlight his role as an influential inventor in the field. His innovations continue to shape the future of semiconductor technology.