The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2010
Filed:
Apr. 07, 2008
Lena Nicolaides, Castro Valley, CA (US);
Alexei Salnik, San Jose, CA (US);
Bin-ming Benjamin Tsai, Saratoga, CA (US);
Lena Nicolaides, Castro Valley, CA (US);
Alexei Salnik, San Jose, CA (US);
Bin-ming Benjamin Tsai, Saratoga, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
Samples subject to ion implantation are measured using a modulated optical reflectance system and the results of the measurements are compared to specification ranges for acceptable samples and a plurality of parametric ranges. Each parametric range is associated with a different known type of implantation fault. Measurement results outside of the specification range may be characterized by fault type by comparing the measurement results to a plurality of parametric ranges. In this way, a fault type may be quickly identified and the corresponding source of the fault may be corrected.